发明名称 FLUID CONTROL MECHANISM
摘要 PROBLEM TO BE SOLVED: To provide a fluid control mechanism and a fluid control method relatively easy to reduce a size, and suitable for a micro-tool or the like which does not require any particular external power. SOLUTION: This fluid control mechanism is provided with a liquid tank part 2 for holding a liquid having at least one liquid passing port, and controls inflow/outflow of the liquid via the liquid passing port, by irradiation/non-irradiation to the liquid tank part 2 of a light beam 5 for supplying noncontactly energy via a space. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005024544(A) 申请公布日期 2005.01.27
申请号 JP20040160372 申请日期 2004.05.31
申请人 CANON INC 发明人 ITO HIROHITO
分类号 G01N35/10;G02B21/32;(IPC1-7):G01N35/10 主分类号 G01N35/10
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