| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic heater capable of surely securing electric conduction between a resistive heating element and an external terminal and stably supplying power to the resistive heating element, even if heating and cooling are repeated while using the ceramic heater for a long period. SOLUTION: On the ceramic heater, with the resistive heating element and a through-hole having a screw hole with its one part exposed at just under the terminal part of the resistive heating element formed inside a ceramic base plate, and with the reisistive heating element electrically connected to the external terminal by a screw part of the external terminal composed of the screw part and a main body part being screwed in the screw hole, a constricted structure is formed in a manner that a diameter of a ridge of the screw part is smaller than that of the main body part, and a diameter at the neighborhood of the main body part of the screw part is smaller than that of a groove part of the screw part. COPYRIGHT: (C)2005,JPO&NCIPI |
