| 摘要 |
PROBLEM TO BE SOLVED: To provide a projection optical system which can maintain its performance even when the stroke of an actuator for regulating the focusing state of the projection optical system is reduced and the stroke of the actuator is reduced, and to provide an aligner using the same. SOLUTION: The projection optical system 40 is completed by attaching units U1, U2 to an optical surface plate 73. Then, the projection optical system 40 is set in a measuring device 210, and relative positions and postures of respective partial projection optical systems PL1-PL7 are regulated, etc., and a relative alignment (coarse regulation) of image forming characteristics is performed. COPYRIGHT: (C)2005,JPO&NCIPI
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