| 摘要 |
PROBLEM TO BE SOLVED: To provide a mask device for wet treatment by which the body to be treated such as a base-integrated type joined member can efficiently be treated, and, even in the case where the warpage of the body to be treated is large or it has a complicated shape, the phenomenon that a treatment liquid infiltrates into the part other than the part to be treated in the body to be treated and unrequired wet treatment is performed can be prevented. SOLUTION: The mask device for wet treatment comprises: a mask member 24 covering the peripheral part of a metal circuit plate 14 (the part around the part to be treated of the metal circuit plate 14) of a base-integrated joined member 10 and having opening parts from which the parts to be treated of the metal circuit board 14 are exposed; a support plate 26 having opening parts from which the parts to be treated of the metal circuit plate 14 are exposed; and a plurality of magnets 28 allowing the support plate 26 to support the mask member 24 and allowing the mask member 24 to be abutted on the peripheral part of the metal circuit plate 14 (the part around the part to be treated of the metal circuit plate 14) in a watertight way. COPYRIGHT: (C)2005,JPO&NCIPI
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