发明名称 Downward mechanism for support pins
摘要 A downward mechanism for support pins is applicable to a reactor of removable type. Support pins are located on the base of the reactor, and each support pin has a base thereunder. The downward mechanism has an elevator mechanism and a board fixed thereto. The board has several holes for the pin and the base to pass respectively therethrough. Each hole elongates into a slit allowing each of the support pins, only, to pass respectively therethrough.
申请公布号 US2005016469(A1) 申请公布日期 2005.01.27
申请号 US20040824433 申请日期 2004.04.15
申请人 WONG CHING-HONG;CHANG HSI-MING 发明人 WONG CHING-HONG;CHANG HSI-MING
分类号 C23C16/00;C23C16/458;C23C16/54;H01L21/205;H01L21/687;(IPC1-7):C23C16/00 主分类号 C23C16/00
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