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发明名称
BELIEBIG BREITES LINSENARRAY MIT EINEM SICH ÜBER DIE BREITE EINES SUBSTRATS ERSTRECKENDEN BILDFELD
摘要
申请公布号
DE69634075(D1)
申请公布日期
2005.01.27
申请号
DE19966034075
申请日期
1996.02.12
申请人
ULTRATECH, INC.
发明人
MARKLE, A.
分类号
G02B3/00;G02B13/26;G02B17/08;G03F7/20;H01L21/027;(IPC1-7):G02B17/00
主分类号
G02B3/00
代理机构
代理人
主权项
地址
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