| 发明名称 |
POSITIVE-WORKING DIAZO-OXIDE TERPOLYMER PHOTORESISTS |
| 摘要 |
A novel positive-working photoresist composition comprising a diazo-oxide such as N-dehydroabietyl-6-diazo-5(6H)-oxo-1-naphthalene-sulfonamide, a resin such as a terpolymer which contains carboxy groups, and a solvent therefor.
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| 申请公布号 |
US3637384(A) |
申请公布日期 |
1972.01.25 |
| 申请号 |
USD3637384 |
申请日期 |
1969.02.17 |
| 申请人 |
GAF CORP. |
发明人 |
ALBERT S. DEUTSCH;FRANK J. LOPREST |
| 分类号 |
G03C1/72;C07C67/00;C07C301/00;C07C311/20;C08J3/28;C08K5/17;C08L25/00;C08L33/00;C08L33/02;C08L33/04;G03F7/022;G03F7/023;(IPC1-7):G03F7/08 |
主分类号 |
G03C1/72 |
| 代理机构 |
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代理人 |
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