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发明名称
Chemical mechanical abrasive composition for use in semiconductor processing
摘要
申请公布号
EP1069168(B1)
申请公布日期
2005.01.26
申请号
EP20000304246
申请日期
2000.05.19
申请人
ETERNAL CHEMICAL CO., LTD.
发明人
LEE, TSUNG-HO;LEE, KANG-HUA;YEH, TSUI-PING
分类号
C09G1/02;C09K3/14;(IPC1-7):C09G1/02
主分类号
C09G1/02
代理机构
代理人
主权项
地址
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