| 摘要 |
A surface inspection apparatus includes a light source section for emitting a first and a second luminous flux; a first and a second irradiation optical system in which the first and the second luminous flux are irradiated on the surface of an inspected object at a first and a second irradiation angle, respectively; a displacement section for relatively displacing an inspected object and an irradiation luminous flux of the irradiation optical system; a light receiving optical system for receiving scattered light of the first and the second luminous flux; a first and a second light receiving section for converting scattered light of the first and second luminous flux into a first and a second light receiving signal, respectively; and a signal forming section for forming a measuring signal on the basis of the first and the second light receiving signal. The first and the second light receiving section form a first and a second light receiving signal which are different in sensitivity or dynamic range from each other, and synthesizes the first and the second light receiving signal to form a measuring signal.
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