发明名称 Optical switching matrix and method of fabricating such a matrix
摘要 An optical switching matrix, including optical input fibers (12) and optical output fibers (14) oriented substantially perpendicular to each other, moveable mirrors (5, 13) placed at the intersections of the directions defined by the various optical fibers, each mirror (13) being capable of moving in order to reflect a beam coming from an optical input fiber, bound for an optical output fiber, and a set of channels defined between the mirrors, inside which the various beams are propagated before and after having encountered the mirrors. The set of mirrors are made on a first substrate wafer (2) that is covered with a second substrate wafer (20), and the various channels (38) are formed between protruding zones (34) present under the second substrate wafers. The protruding zones include housings (33) inside which the moveable mirrors are able to move.
申请公布号 US6847756(B2) 申请公布日期 2005.01.25
申请号 US20030391336 申请日期 2003.03.18
申请人 MEMSCAP 发明人 KHALIL DIAA;MADKOUR KAREEM;SAADANY BASSAM;BADRELDIN TAREK;HELIN PHILIPPE
分类号 G02B26/08;B81B3/00;B81B7/04;G02B5/08;G02B6/35;(IPC1-7):E02B6/35 主分类号 G02B26/08
代理机构 代理人
主权项
地址