METHOD FOR FORMING VOLTAGE VARYING WITH TEMPERATURE OF VOLTAGE DIVIDER TO AUTOMATICALLY OBTAIN OPTIMIZED DISTRIBUTION VOLTAGE

摘要

PURPOSE: A method for forming a voltage varying with the temperature of a voltage distributer is provided to automatically obtain an optimized division voltage by slightly changing the constitution of a resistor of a voltage divider. CONSTITUTION: A polycrystalline silicon conductive layer to be used as a resistor is formed. An ion implantation process using a photoresist layer pattern for opening only a part of a resistance layer pattern is performed to form resistance bars(110,112) with different temperature characteristics. Ions of an opposite conductivity type to that of the implanted ions are implanted by using a photoresist layer pattern for opening the unopened region. A metal contact(102,108) is formed to interconnect the resistance bars. The resistance bars are serially connected by a metal conductive layer.