OPTICAL MICROSCOPE SYSTEM, OPTICAL AXIS CORRECTION METHOD USING SAME, OPTICAL AXIS CORRECTION PROGRAM, AND RECORDING MEDIUM HAVING THE PROGRAM RECORDED THEREIN

摘要

PROBLEM TO BE SOLVED: To provide an optical microscope system which allows disalignment of an optical axis to be corrected with an observation object kept still on a stage. SOLUTION: The optical microscope system acquires an image by an imaging unit 8a and comprises; an operation part 10c which detects a coordinate of a prescribed position in a fundamental chart imaged through an optical element 6a (or 6b) and a coordinate of a position corresponding to the prescribed position in a fundamental chart imaged with the optical element 6a (or 6b) off; an arithmetic part 10b which calculates the deviation amount between detected coordinates of the positions; and a stage controller 12 which moves stages 8b, 8c, and 8d having the imaging unit 8a installed thereon, on the basis of calculated deviation information. COPYRIGHT: (C)2005,JPO&NCIPI