METHOD FOR MANUFACTURING SINGLE CRYSTAL, AND SINGLE CRYSTAL

摘要

PROBLEM TO BE SOLVED: To provide a method capable of stably manufacturing a single crystal in which the total surface in a crystal diameter direction is a defect-free region over the total range of the crystal growth axis direction when the single crystal is grown by a CZ method. SOLUTION: In the method for manufacturing the single crystal in which the total surface in the diameter direction is the defect-free region by pulling the single crystal from a raw material melt liquid in a chamber by a Czochralski method, a pulling condition is changed in the growth axis direction while pulling the single crystal so that the margin of a pulling speed capable of pulling the single crystal so that the total surface in its diameter direction is the defect-free region may be always a prescribed value or over. COPYRIGHT: (C)2005,JPO&NCIPI