| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To enhance moisture resistance without reducing characteristics of a waveguide chip, in an optical waveguide module using a polymer waveguide and a thermo-optical effect. <P>SOLUTION: The optical waveguide module 1 is provided with a waveguide plate 20, a sealing block 30, reinforcing blocks 32 and optical fiber arrays 40 connected to the front and the rear of the waveguide plate 20. The waveguide plate 20 is provided with a clad 22 and a core 23 both disposed at a silicon substrate 21 and consisting of a polymer and a heater 24 to attenuate or deflect light in the inner part of the core 23. The sealing block 30 has a recess 31 on a side facing a waveguide, the waveguide is sealed while the core 23 and the heater 24 of the optical waveguide plate 20 do not come into contact with the sealing block 30 to enhance moisture resistance of the optical waveguide plate 20, and switching operation by the core 23 can be realized with satisfactory thermal efficiency without reducing the characteristics of the waveguide chip by suppressing heat leakage by a closed cavity formed by the recess 31. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
