| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive heating means that can suppress the occurrence of contaminations caused by organic matters, metals, etc., and, in addition, can be manufactured relatively easily. SOLUTION: The heating means is formed by welding a quartz tube 62, through which a carbon wire 64 which generates heat when the wire 64 is conducted is passed to the surface of a reflecting plate 60 composed of opaque quartz. Consequently, the heating means can be provided inexpensively, because a heated object to be treated can be heated by little causing contaminations caused by organic matters, metals, etc., and, in addition, the means can be manufactured relatively easily. COPYRIGHT: (C)2005,JPO&NCIPI |
