PLASMA GENERATING ELECTRODE AND PLASMA REACTOR

摘要

A plasma generation electrode (1) includes two or more electrodes (2) arranged to oppose each other and holding members (3) for holding the electrodes (2) at a predetermined interval. The plasma generation electrode (1) can generate plasma by applying voltage between the electrodes (2). At least one of the opposing electrodes (2) has a plate-shaped ceramic body (6) serving as a dielectric body and a conductive film (7) arranged inside the ceramic body (6). The holding members (3) fix the opposite side end portions (5) (fixed end portions 5a) of the opposing electrodes (2) in the state of cantilever. As a whole, the every other electrodes (2) are held by cantilevers of different directions at a predetermined interval. This mitigates the thermal stress and effectively prevents distortion and breakage of the electrode by a temperature change.