发明名称 LASER PULSE PICKING EMPLOYING CONTROLLED AOM LOADING
摘要 A laser (126) and an AOM (10) are pulsed at substantially regular and substantially similar constant high repetition rates to provide working lase r outputs (40) with variable noimpingement intervals (50) without sacrificing laser pulse-to-pulse energy stability. When a working laser output (40) is demanded, an RF pulse (38) is applied to the AOM (10) in coincidence with th e laser output pulse (24) to transmit the laser pulse to a target. When no working laser output (40) is demanded, an RF pulse (38) is applied to the AO M (10) in noncoincidence with the laser output (24), so that the laser pulse i s blocked. Thus, the average thermal loading on the AOM (10) remains substantially constant regardless of how randomly the working laser outputs (40) are demanded. The AOM (10) can also be employed to control the energy o f the working laser output (40) by controlling the power of the RF pulse (38) applied. When the RF power is changed, the duration (44) of the RF pulse (38 ) is modified to maintain the constant average RF power.
申请公布号 CA2530688(A1) 申请公布日期 2005.01.20
申请号 CA20042530688 申请日期 2004.05.05
申请人 ELECTRO SCIENTIFIC INDUSTRIES, INC. 发明人 SUN, LEI;NILSEN, BRADY E.;HEMENWAY, DAVID M.;SUN, YUNLONG
分类号 H01L21/268;B23K26/06;B23K26/08;B23K26/38;H01S3/00 主分类号 H01L21/268
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