ORGANIC ELECTROLUMINESCENCE DISPLAY DEVICE, METHOD AND DEVICE FOR MANUFACTURING IT AND ELECTRONIC APPARATUS PROVIDED WITH THE ORGANIC ELECTROLUMINESCENCE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method by vapor deposition with uniform in-plane thickness distribution, stable deposition rate and suppressed abnormal vapor deposition in forming a thin film constituting each layer of an organic EL element by vapor deposition. SOLUTION: This manufacturing method for the organic electroluminescence display device forms the thin film which serves as the organic electroluminescent element by vapor deposition. Crucibles 2 each housing the same vapor deposition material are disposed in two or more position in a vacuum vessel 1 of a vapor deposition device, and the vapor deposition material of each crucible 2A is deposited on a substrate 5 to manufacture the organic electroluminescence display device. COPYRIGHT: (C)2005,JPO&NCIPI