| 摘要 |
PROBLEM TO BE SOLVED: To provide a Hall element whose thermal resistance is improved by providing a high elastic modulus layer between a semiconductor thin film and a magnetic converging chip. SOLUTION: A magnetoelectric transducer includes at least one high elastic modulus layer 2 having an elastic modulus of 1,100-10,000 MPa and a thickness of 0.3-10μm on the semiconductor thin film 1 which senses a magnetism. The semiconductor thin film 1 is formed on a substrate 3 made of a high permeability magnetic material through an adhesion resin layer 5. Thus, electrical characteristics in a heat resistance test of the Hall element and release of the semiconductor thin film can be suppressed, and the thermal resistance and reliability of the Hall element can be largely improved. COPYRIGHT: (C)2005,JPO&NCIPI
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