THIN FILM DEPOSITION METHOD, THIN FILM MANUFACTURING APPARATUS, AND THIN FILM DEPOSITED BODY

摘要

PROBLEM TO BE SOLVED: To provide a thin film deposition method, a thin film manufacturing apparatus, and a thin film deposited body in which a thin film of excellent water repellency and oil repellency can be deposited, and the film deposition efficiency is enhanced. SOLUTION: In the thin film deposition method, discharge gas is introduced in a discharge space and excited under atmospheric pressure or the pressure close to atmospheric pressure, the excited discharge gas is mixed with thin film deposition gas containing a raw material outside the discharge space to form secondary excitation gas, and a thin film is deposited on a base material by exposing the secondary excitation gas to the base material. COPYRIGHT: (C)2005,JPO&NCIPI