| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide equipment for dividing a planar article in which a planar article having strength lowering along a scheduled division line is divided efficiently, and divided chips are picked up without being damaged. <P>SOLUTION: The equipment for dividing a planar article, stuck to the upper surface of a protective tape fixed to an annular frame and having strength lowering along a scheduled division line, along the scheduled division line comprises means for: holding the frame; stretching the protective tape fixed to the frame held by the frame holding means; detecting the planar article stuck to the protective tape; pressing the scheduled division line of the planar article detected by the detecting means through the protective tape and dividing the planar article along the scheduled division line into chips, sticking up the divided chip through the protective tape, and picking up the chip thus stuck up. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
