| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To remove static electricity efficiently when a work is separated from a suction table. <P>SOLUTION: A suction table 16 is equipped with a plurality of air suction holes 24 for sucking up the work 12, and a plurality of lift pins 26 for lifting up the work 12 from the work placing surface 16a. The air suction holes 24 and the lift pins 26 are provided on the work placing surface 16a of the suction table 16 where the work 12 is placed. Horizontal pathways 30 communicating with the air suction holes 24 are made to communicate with a suction tube 32 connected to the side of the suction table 16. One end of an ionized gas supply tube 38 for supplying ionized gas is ramified and connected to the suction tube 32. The other end of the ionized gas supply tube 38 is connected to the discharge orifice 40a of an ion generator 40 which generates ionized gas. Therefore, ionized gas can be supplied onto the work placing surface 16a through the suction tube 32, and static electricity can be efficiently removed from the charged work 12 in a short time. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
