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发明名称
Micromechanical device and process for its manufacture
摘要
申请公布号
EP1232996(A3)
申请公布日期
2005.01.19
申请号
EP20010127972
申请日期
2001.11.24
申请人
ROBERT BOSCH GMBH
发明人
FISCHER, FRANK;FREY, WILHELM, DR.
分类号
B81C1/00;B81B3/00;(IPC1-7):B81B3/00
主分类号
B81C1/00
代理机构
代理人
主权项
地址
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Sealing label
