| 发明名称 |
Machining apparatus utilizing laser beam |
| 摘要 |
A machining apparatus utilizing a laser beam, the machining apparatus being capable of efficiently forming a deterioration zone of a required thickness along a division line. A laser beam from laser beam generation means is focused not to a single focused spot, but to at least two focused spots displaced in the direction of an optical axis.
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| 申请公布号 |
US2005006361(A1) |
申请公布日期 |
2005.01.13 |
| 申请号 |
US20040885311 |
申请日期 |
2004.07.07 |
| 申请人 |
KOBAYASHI SATOSHI;NAGAI YUSUKE |
发明人 |
KOBAYASHI SATOSHI;NAGAI YUSUKE |
| 分类号 |
B23K26/00;B23K26/06;B23K26/067;B23K26/40;B23K101/40;H01L21/301;(IPC1-7):B23K26/06 |
主分类号 |
B23K26/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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