| 摘要 |
A load port transfer device. The device, for delivering a wafer carrier along an overhead conveying system, includes a load port, a path, and a robot. The path has vertical and horizontal components. The vertical component has a top portion connected to the horizontal component and disposed beside the overhead conveying system and a bottom portion extending from the load port. The robot is movably disposed on the path to transfer the wafer carrier between the load port and the overhead conveying system.
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