METHOD FOR MANUFACTURING SYNTHETIC SILICA GLASS LARGE-SIZED PLATE MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a silica glass large-sized plate material having high initial transmittance to high output vacuum UV in the range of 160-200 nm wavelength and having excellent durability and uniformity. SOLUTION: In the method, a cylindrical synthetic silica glass body is manufactured by forming a white soot body by an oxyhydrogen flame hydrolysis method by using a high purity silicon compound as a raw material and adjusting an OH group concentration of the soot body and vitrifying the soot body, then forming a synthetic silica glass tube by horizontal tube drawing, then molding the tube to the large-sized plate material by tube opening treatment in a tangential direction of the tube. COPYRIGHT: (C)2005,JPO&NCIPI