| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining device provided with a galvanoscanner scanning system, in which such a function that safety is raised by preventing the leakage of the laser beam due to the unintended irradiation of the laser beam caused by the abnormality of the device is added to the galvanoscanner control system. <P>SOLUTION: When the error signals of the abnormal output of the laser beam, the operation of a safety switch or the like due to the abnormality of the laser beam machining device 1 are inputted to a controller, the leakage to the outside is prevented by turning the direction of the laser beam 3 which is reflected with a mirror 10 in a galvanoscanner 4 to the inside of the laser beam machining device from the direction of an fθlens 5. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
