METHOD AND AN APPARATUS FOR ASSEMBLING A SUBSTRATE TO ACCURATELY ASSEMBLE THE SUBSTRATE WITHOUT TRANSFORMATION OF THE SUBSTRATE

摘要

PURPOSE: A method and an apparatus for assembling a substrate are provided to accurately assemble the substrate without transformation of the substrate even though the size of the substrate increases and the thickness of the substrate reduces. CONSTITUTION: A vacuum chamber(14) holds the whole area of a counter substrate with respect to a pressurization plate(15) by suction adsorption in atmosphere. A shaft(9) mechanically holds intermediate parts of a pair of opposite sides in the counter substrate. A conversion valve(22) releases the suction adsorption at one side of the remaining opposite sides in the counter substrate, thus making each side free, and then releases the suction adsorption over both intermediate parts of the pair of the opposite sides. An electric motor applies a voltage for electrostatic adsorption to the pressurization plate when a vacuum chamber is set at a desired vacuum.