| 摘要 |
The invention relates to a piezoactuator for miniaturized pumps, atomizers, valves or the like. The piezoactuator comprises a piezoceramic disk (1) and a pressure disk (2) coupled to the piezoceramic disk. Said pressure disk is linked on its rim (18) with a substrate (3) in a fluid-tight manner and can be deflected by the piezoceramic disk (1) while modifying the volume of a cavity (4) formed between the pressure disk (2) and the substrate (3). According to the invention, a weak point (6, 9) is provided which extends along the linked rim (18) of the pressure disk (2) and forms a joint when the pressure disk is deflected. |
