Lithographic apparatus, device manufacturing method, and device manufactured by said method
摘要
申请公布号
EP1148389(A3)
申请公布日期
2005.01.12
申请号
EP20010303479
申请日期
2001.04.12
申请人
ASML NETHERLANDS B.V.
发明人
JANSSEN, HENDRICUS WILHELMUS ALOYSIUS;RENKENS, MICHAEL JOZEFA MATHIJS;TABOR, ROB;VIJFVINKEL, JAKOB;SCHNEIDER, RONALD MAARTEN;BISSCHOPS, THEODORUS HUBERTUS JOSEPHUS
