| 摘要 |
PURPOSE: An apparatus for drying a substrate is provided to simultaneously reduce the size of a cleaning equipment and improve drying performance by bending a main air knife to form at least one convex portion and installing a sub-air knife for jetting air at the convex portion of the bent main air knife. CONSTITUTION: A main air knife(1) for jetting air is disposed over or under a substrate(G), wherein the main air knife is bent to form a convex portion(1a). The bent main air knife has arm portions of which length directions slope with respect to transfer direction of the substrate. A sub-air knife(3) is installed at the convex portion of the main air knife to jet air at the substrate. When the main air knife is bent at two or more portions, the main air knife has two or more convex portions and one or more concave portions. Herein, two or more sub-air knifes are installed at the convex portions and one or more sucking elements for sucking a cleaning solution are installed at the concave portions.
|
