MEMS enhanced capacitive pick-off and electrostatic rebalance electrode placement

摘要

A Micro Electro-Mechanical System (MEMS) acceleration sensing device, formed of a sensing element having first and second substantially planar and parallel spaced apart opposing surfaces and being suspended for pendulous motion about a hinge axis oriented along a minor axis of the sensing element; and one or more substrates each having a face spaced from one of the opposing surfaces of the sensing element, each of the substrates having pluralities of electrodes arranged substantially crosswise to the hinge axis of the sensing element symmetrically to a longitudinal axis of the sensing device and forming respective first and second capacitors with the moveable sensing element. Each of the one or more substrates optionally including a clearance relief for extending the rotational range of motion of the sensing element.