ROTATABLE CHUCK WITH RING TYPE PROTRUSION CAPABLE OF PREVENTING CHEMICAL CONTAMINATION

摘要

PURPOSE: A rotatable chuck capable of preventing chemical contamination is provided to restrain the permeation of liquid phase chemicals by forming a ring type protrusion on a plate of the chuck. CONSTITUTION: A rotatable chuck includes a plate(25), a vacuum pad, an object fixing part, a protrusion(23) for preventing chemical permeation and a rotating shaft. The vacuum pad(27) is installed on the center of the plate and connected with a vacuum line. The object fixing part(21) is installed at an edge of the plate. The protrusion is formed like a circle structure on the plate within the object fixing part. The rotating shaft(26) is connected with a lower center portion of the plate.