MICROMACHINED MOVING STAGE AND METHOD FOR OPERATING THEREOF TO IMPROVE MINUTE DISPLACEMENT OF VERY SMALL OBJECTS IN CONVENIENT WAY

摘要

PURPOSE: A micromachined moving stage and method for operating thereof are provided to improve minute displacement of very small objects in convenient way. CONSTITUTION: The method for operating a micromachined moving stage(10) comprises: moving forward or backward an object(20) by gripping it with moving members(33,43) of a first and a second driving devices(30,40) positioned on each side of the object, wherein the object is elastically mounted and supported on a substrate(100) so as to move to a single axis direction; fixing the displacement of the moved object by using fixing members of a first and a second fixing devices(50,60) positioned on each side of the object; removing gripping power of the first and second driving devices from the fixed object, and returning the driving members to their original positions; and moving the object by gripping it with the first and the second driving devices and canceling the displacement fixation of the object by the first and the second fixing members.