| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer lamp capable of effectively preventing a reaction product from attaching to a discharge container, in a reaction process using the excimer lamp, and to provide an irradiation device. SOLUTION: The excimer lamp light emitting device comprises the excimer lamp 10 in which one discharge electrode 2 is arranged on an outer surface of the discharge container made of a dielectric material filled with discharge gas, and another discharge electrode 3 is arranged inside the discharge container 1, an excimer light emission power supply 8 for supplying excimer discharging power between the both electrodes of the excimer lamp 10, a heater power supply 8 connected to one of the discharge electrodes, and a control part 11 for controlling the excimer light emission power supply 7 and the heater power supply 8. The control part 11 controls the heater power supply 8 to increase the temperature inside the discharge container to a predetermined level, and drives the excimer light emission power supply 7 to cause excimer light emission. COPYRIGHT: (C)2005,JPO&NCIPI
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