| 摘要 |
PROBLEM TO BE SOLVED: To provide a deflecting magnetic field-type vacuum arc deposition apparatus of a duct end common type capable of forming a thin film of a desired structure on an article being a deposition object with good productivity. SOLUTION: The apparatus is equipped with vapor deposition units UN 1 and UN 2. The unit include, respectively, evaporation sources 3 and 3' and curved filter ducts 4 and 4' provided with magnetic field forming coils 400, 42 and 42'. The ducts 4 and 4' commonly have a duct end 40 formed facing a supporting holder 2 for supporting the object where the film is deposited. The evaporation sources 3 and 3' are disposed at the opposite ends 41 and 41' of the respective ducts. The common coil 400 is installed to the duct end 40 and another magnetic field forming coils 42 and 42' are installed at the respective ducts. The respective coils are provided with devices (motors m1 and and m2 and a driving device PC , motors M1 and M2 and a driving device PC1, motors M1' and M 2' and a driving device PC1') for regulating the installation state. COPYRIGHT: (C)2005,JPO&NCIPI
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