| 摘要 |
PROBLEM TO BE SOLVED: To provide a method precisely measuring permeability to an illumination illuminance in the permeability measurement of an optical element to an excimer laser beam. SOLUTION: The method includes a laser beam irradiating means and a laser beam receiving means to test sample CaF<SB>2</SB>and a polarized light resolving plate is arranged in a laser. Consequently, a device calculating the precise permeability and the measurement method are proposed independently of double refraction a sample possesses. COPYRIGHT: (C)2005,JPO&NCIPI |
