| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact, large-area, and high-sensitivity radiation detector capable of fluoroscopy by stacking a planar photomultiplier and a photosensor array. SOLUTION: X rays impinge from an Al substrate 1 of an incident window and are converted to visible rays by a CsI phosphor 2, and further the converted rays are converted to electrons on an S20 photoelectric cathode surface 3. The electrons are multiplied by a GaP diode 4, are converted to visible rays again by a zinc-sulfide-based P20 phosphor 5, and are detected by a sensor substrate 7, where a MIS-type PD and a TFT are combined. COPYRIGHT: (C)2005,JPO&NCIPI
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