| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a carbon nanotube (CNT) by which the production quantity of the carbon nanotube is changed without changing the synthetic condition such as a synthetic time and a flow rate of a gaseous starting material. SOLUTION: A substrate 1 composed of an alloy (Cu-Ni alloy) of Ni which is a CNT forming catalyst and Cu which is a non-forming catalyst is set in a reaction tube 2. A synthetic part 8 is heated to 700°C by an infrared image furnace 4. Acetylene is supplied at a flow rate of 100 cm<SP>3</SP>/min from a pipe 7a, argon is supplied at a flow rate of 20 cm<SP>3</SP>/min from a pipe 7b and an exhausted gas is discharged from a pipe 7c. The state is kept for 10 min to react the catalytic metal with acetylene. At this time, the temperature of the substrate 1 is measured by a thermocouple 3 and the temperature of the infrared image furnace 4 is controlled based on the temperature of the substrate 1 by a temperature controller 5 to keep the temperature of the synthetic part 8 at 700°C. As a result, the CNT is formed in the quantity corresponding to Ni content in the substrate 1 on the substrate 1. COPYRIGHT: (C)2005,JPO&NCIPI |
