| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for attaching an organic film to a substrate capable of enhancing surface properties (surface irregularity precision, uniformity) and precision of a position after attaching the film to the substrate, and an attaching apparatus. SOLUTION: This method for attaching the organic film to the substrate comprises a step (a) of fixing a filmy organic material 12 on a fixing stage 11, a step (b, c) of spin coating an adhesive 13 on the filmy organic material 12, a step (a) of fixing a substrate 14 to the surface coated with the adhesive 13 and a step (d) of curing the adhesive 13. The step (b, c) comprises suction fixing the marginal portion of the filmy organic material to the fixing stage and making the substrate contact with the adhesive at a part of the marginal portion before spreading gradually the contact area of the two. COPYRIGHT: (C)2005,JPO&NCIPI |
