IPA VAPOR DRYING APPARATUS WITH IPA DENSITY MONITORING SENSOR TO PROPERLY COPE WITH VARIATION OF IPA DENSITY

摘要

PURPOSE: An IPA(isopropyl alcohol) vapor drying apparatus with an IPA density monitoring sensor is provided to properly cope with a variation of an IPA density by detecting the variation of the IPA density in real time. CONSTITUTION: A wafer(135) is built in a housing(130) whose upper part is filled with deionized water. The upper part of the housing is covered with a hood(120) having a predetermined inner space. IPA(145) and nitrogen(155) are supplied and injected to the wafer by the hood. An IPA/nitrogen supply part(200) supplies IPA and nitrogen, connected to the hood. A density sensor(185) monitors the density of IPA supplied to the hood in real time, positioned in the IPA/nitrogen supply part.