发明名称 |
SUPERCRITICAL TREATMENT APPARATUS |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To continuously carry out a liquid treatment and a supercritical treatment in a single treatment apparatus in a time shorter than before. <P>SOLUTION: A heater 114 installed on the opposite to a stage 112 is used as heating means for heating a supercritical substance introduced above the stage 112 to produce the supercritical state of the supercritical substance. A temperature control mechanism 113 controllable by a temperature control part 122 is controlled so as to keep a stage 112 at the temperature lower than the heating temperature by the heater 114. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
申请公布号 |
JP2005000853(A) |
申请公布日期 |
2005.01.06 |
申请号 |
JP20030168959 |
申请日期 |
2003.06.13 |
申请人 |
NIPPON TELEGR & TELEPH CORP |
发明人 |
IKUTSU HIDEO |
分类号 |
F26B9/06;B01J3/00;B01J3/04;F26B21/14;H01L21/027;(IPC1-7):B01J3/00 |
主分类号 |
F26B9/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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