SYSTEM AND METHOD FOR CONTROLLING MEASURING UNIT OF SEMICONDUCTOR EQUIPMENT TO AVOID LOSS OF CONTROL NUMBER AND IMPROVE WORK EFFICIENCY

摘要

PURPOSE: A system for controlling a measuring unit of semiconductor equipment is provided to avoid a loss of a control number by attaching and recognizing a bar code, and to improve work efficiency by simultaneously monitoring the information of a plurality of measuring units. CONSTITUTION: A bar code recognizing part(110) recognizes the bar code attached to a measuring unit for measuring semiconductor equipment. Based upon the data detected by the bar code recognizing part, a control part(120) searches for the information of semiconductor equipment coinciding with the data. A display part(140) receives the information of the semiconductor equipment from the control part and displays the received information.