| 摘要 |
PROBLEM TO BE SOLVED: To provide a spin treatment apparatus which attains reduction of load to a rotary drive section and suppresses turbulence in a treatment tank. SOLUTION: In the treatment tank 6 of the spin treatment apparatus, a prescribed plurality of positioning guide pins 2 are disposed. A table 3 is disposed so as to be located directly below a substrate 1 to be treated. In the table 3, a plurality of gas blowing out holes 4 and a plurality of gas exhaust holes 5 are respectively formed. A controlling section 18 for controlling flow rate, or the like, is connected with a gas supply section 11 and a gas exhaust section 12. The positioning guide pin 2 is connected with a driving shaft 16 of the rotary drive section 17. The table 3 is not connected with the driving shaft 16 and is fixed to the treatment tank 6. COPYRIGHT: (C)2005,JPO&NCIPI
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