| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method and an inspection device for crystal film capable of attaining the stable operation of a manufacturing process caused by becoming possible to forme the crystal film capable of obtaining a desired crystallization degree. SOLUTION: The state of the crystallization of the crystal film for a monitor scanned in a 2nd direction irradiated with a laser beam varying irradiation energy is 2-dimensionally inspected at multiple inspection portions arranged in a 1st direction and a 2nd direction. On the basis of this inspection results the inspection conditions including the inspection portions are set, therefore, even if the distribution of the crystallization state in a face is discretely generated, the objective crystal film can be inspected and measured with further higher precision than conventional technology. COPYRIGHT: (C)2005,JPO&NCIPI |
