A method, program product and apparatus for generating assist features utilizing an image field map

摘要

Disclosed concepts include a method, program product and apparatus for generating assist features for a pattern to be formed over a surface of a substrate by generating an image field map corresponding to the pattern. Characteristics are extracted from the image field map, and assist features are generated for the pattern in accordance with the characteristics extracted in step. The assist features may be oriented relative to a dominant axis of a contour of the image field map. Also, the assist features may be polygon-shaped and sized to surround to contour or relative to the inside ofthe contour. Moreover, the assist features may be placed in accordance with extrema identified from the image field map. Utilizing the image field map, conventional and complex two dimension rules based approach for generating assist feature can be obviated.