发明名称
摘要 A fabrication chuck (100) for applying a thin membrane (105) to the irregularly-shaped surface (112) of a workpiece (110) includes a foundation (120) adapted to hold the workpiece (110) in a selected fabrication position and an upper chuck assembly (160) adapted to be fastened to the foundation (120). The upper chuck assembly (160) includes an applicator (170) that is moveably mounted so that it can be displaced towards the workpiece (110) in the assembly chamber. The applicator (170) has a mating surface (176) and is adapted to selectively retain the thin membrane (105) on the mating surface (176) until the applicator (170) is disposed in a position so that the thin membrane (105) can be released and deposited in a desired position on the workpiece (110). The foundation (120) is adapted to generate a differential pressure across the workpiece (110) and the thin membrane (105) so as to draw the thin membrane (105) down over the workpiece so that it is in conformal contact with the irregularly-shaped surface (112). <IMAGE>
申请公布号 JP3607317(B2) 申请公布日期 2005.01.05
申请号 JP19940143719 申请日期 1994.06.27
申请人 发明人
分类号 G01T1/20;B29C33/38;B29C51/10;B29C51/26;B29C51/36;B29C63/00;B29C65/48;B29C65/78;G02F1/13;(IPC1-7):B29C51/26 主分类号 G01T1/20
代理机构 代理人
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