VERFAHREN ZUM BESEITIGEN VON KRISTALLSTOERUNGEN AUF EPITAXIAL AUFGEBRACHTEN HALBLEITERSCHICHTEN,申请号DE19752517159-传众专利搜索

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发明名称	VERFAHREN ZUM BESEITIGEN VON KRISTALLSTOERUNGEN AUF EPITAXIAL AUFGEBRACHTEN HALBLEITERSCHICHTEN
摘要
申请公布号	DE2517159(A1)	申请公布日期	1976.10.28
申请号	DE19752517159	申请日期	1975.04.18
申请人	DEUTSCHE ITT INDUSTRIES GMBH	发明人	KRAFT,WOLFGANG;CALON,GEORGES;BORCHERT,SIGURT
分类号	H01L21/302;H01L21/3105;H01L21/311;(IPC1-7):H01L21/302	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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