| 摘要 |
A conveying section (3) conveys an inspected object so as to cross the X-rays irradiated from an X-ray generating section (1). A first sensor module (2a) is disposed along a transmitting direction of the X-rays transmitted through the inspected object, and receives one portion of the X-rays transmitted through the inspected object, and outputs a first electric signal corresponding to a first X-ray energy amount. A second sensor module (2b) receives a remaining portion of the X-rays transmitted through the inspected object, and outputs a second electric signal corresponding to a second X-ray energy amount different from the first X-ray energy amount. Presence/absence of a foreign material mixed in the inspected object can be detected based on the first and second electric signals, which are output from the first and second sensor modules (2a, 2b) to the same inspected object at substantially the same detection time. <IMAGE> |
