发明名称 |
Microfabricated capacitive ultrasonic transducer and related process of fabrication |
摘要 |
<p>The invention relates to a microfabricated capacitive ultrasonic transducer (20) comprising at least one thin plate (21), provided with a metallization (24), suspended over a conductive substrate (23) through supporting elements integrally coupled to the conductive substrate (23), the conductive substrate (23) forming one or more electrodes corresponding to said at least one thin plate (21), characterised in that said supporting elements comprise an ordered arrangement of columns or "pillars" (22) to which the thin plate (21) is integrally coupled, whereby the pillars (22) operate as substantially punctiform constraints.</p><p>The invention further relates to a surface micro-mechanical process for fabricating such microfabricated capacitive ultrasonic transducers (20).</p> |
申请公布号 |
EP1493499(A2) |
申请公布日期 |
2005.01.05 |
申请号 |
EP20040425448 |
申请日期 |
2004.06.18 |
申请人 |
ESAOTE S.P.A. |
发明人 |
CALIANO, GIOSUE;CAROTENUTO, RICCARDO;CARONTI, ALESSANDRO;PAPPALARDO, MASSIMO |
分类号 |
B06B1/02;(IPC1-7):B06B1/02 |
主分类号 |
B06B1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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